SEMulator3D

SEMulator3D is a 3D process tool that enables virtual fabrication of MEMS

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SEMulator3D is a 3D process modeling tool that enables virtual fabrication of MEMS and semiconductor processes.

Based on highly efficient voxel modeling technology, SEMulator3D has the unique ability to emulate complete process flows. Process engineers can detect process flow problems and device design errors before fabricating real devices to avoid the time, cost, and frustration associated with unnecessary build-and-test cycles.

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Specifications
Developer:
Coventor, Inc.
License type:
Demo